ST 2000-DLXn
Leaders of Ideal System
| Item | Specification |
|---|---|
| Measurable Wavelength range | 400 ~ 800nm |
| Detector (Linear Array Type) | 2048 pixels |
| Theoretical resolution | 1.5nm |
| Measurement spot size | 40um(M5x Lens), 20um(M10x Lens) |
| Measuring Speed | ≤ 2sec/ point (Without Moving) |
| Sample Size | Stage Size: 205 x 205 mm / Travel Distance: 205 x 205 mm |
| Thickness measurement range (Depending on materials) |
200 Å ~ 35㎛ (초점 광학계 기준) 1㎛ ~ 35㎛ (비초점 광학계 기준) |
| Multi-layer measurement | Up to 3 layers (Depends on materials) |
| Repeatability (Precision) : 1 sigma | ± 10Å at 5000 Å (SRM certified by KMAC) (Continuously, Measuring the same point 10 times) |
| Item | Specification |
|---|---|
| Measurement and control Unit | System size : 190(W) X 265(L) X 316(H)mm (Except Microscope & PC Size) Weight : about 12 kg |
| Detector | Used wavelength range : 400~800nm Detector: Linear silicon CCD array |
| Reflection Probe | Choose Wavelength : 300~800nm Fiber diameter: 200um |
| Manual X,Y Stage | Roller guide type Stage Size: 205 x 205 mm Travel Distance: 205 x 205 mm |
| Manual Focusing Module | Coaxial coarse & fine focusing controls Revolving nosepiece : Triple Aperture and field iris diaphragms Reflection probe head adapter |
| Optical Lens | M5x, M10x |
| Illuminator & Lamp | Tungsten-Halogen stabilized technical lamp Lamp Spec: 12V, 35W. Color temperature: 2,800K Lamp Life time: mean. 1600hr |
| OS | Windows 7 |
| Data Acquisition System | Monitor: 24” LCD CPU: Pentium IV-Dual↑ RAM: 4G HDD: 500G DVDRW |
| Spare Part | Tungsten-Halogen stabilized technical lamp Lamp Spec: 12V, 35W. Color temperature: 2,800K Lamp Life time: mean. 1600hr |
| Accessory | Power Cable USB Cable Operating manual CD |
