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  • ST 2000-DLXn
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    ST 2000-DLXn

    Leaders of Ideal System

    • Measurement Function
      Item Specification
      Measurable Wavelength range 400 ~ 800nm
      Detector (Linear Array Type) 2048 pixels
      Theoretical resolution 1.5nm
      Measurement spot size 40um(M5x Lens), 20um(M10x Lens)
      Measuring Speed ≤ 2sec/ point (Without Moving)
      Sample Size Stage Size: 205 x 205 mm / Travel Distance: 205 x 205 mm
      Thickness measurement range
      (Depending on materials)
      200 Å ~ 35㎛ (초점 광학계 기준)

      1㎛ ~ 35㎛ (비초점 광학계 기준)

      Multi-layer measurement Up to 3 layers (Depends on materials)
      Repeatability (Precision) : 1 sigma ± 10Å at 5000 Å (SRM certified by KMAC)

      (Continuously, Measuring the same point 10 times)

      Hard ware Specification
      Item Specification
      Measurement and control Unit System size : 190(W) X 265(L) X 316(H)mm (Except Microscope & PC Size)

      Weight : about 12 kg

      Detector Used wavelength range : 400~800nm

      Detector: Linear silicon CCD array

      Reflection Probe Choose Wavelength : 300~800nm

      Fiber diameter: 200um

      Manual X,Y Stage Roller guide type

      Stage Size: 205 x 205 mm

      Travel Distance: 205 x 205 mm

      Manual Focusing Module Coaxial coarse & fine focusing controls

      Revolving nosepiece : Triple

      Aperture and field iris diaphragms Reflection probe head adapter

      Optical Lens M5x, M10x
      Illuminator & Lamp Tungsten-Halogen stabilized technical lamp

      Lamp Spec: 12V, 35W.

      Color temperature: 2,800K

      Lamp Life time: mean. 1600hr

      OS Windows 7
      Data Acquisition System Monitor: 24” LCD

      CPU: Pentium IV-Dual↑

      RAM: 4G

      HDD: 500G

      DVDRW

      Spare Part Tungsten-Halogen stabilized technical lamp

      Lamp Spec: 12V, 35W.

      Color temperature: 2,800K

      Lamp Life time: mean. 1600hr

      Accessory Power Cable

      USB Cable

      Operating manual CD