ST 2080-DLXn
Leaders of Ideal System
| Item | Specification |
|---|---|
| Measurable Wavelength range | 420nm~640nm |
| Detecto | 2 Dimensional CCD Camera |
| Measurement spot size | 1.48um(M5x Lens), 0.148um(M50x Lens) |
| Sample Size | Stage Size: 200 x 200 mm |
| Thickness measurement range | 350 Å ~ 3㎛ (Depending on materials) > 0.15㎛ ( OSP on Cu) ※ 0.1~0.15㎛ |
| Multi-layer measurement | Single Layer |
| Repeatability (Precision) : 1 sigma | ± 30Å at 5000 Å (SRM certified by KMAC) (Continuously, Measuring the same point 10 times) |
| Item | Specification |
|---|---|
| Measurement and control Unit | Dimension : 250 x 350 x 320mm (Control Unit) 400 x 390 x 520mm (Detector) Weight : About 55kg |
| Detector | 2 Dimensional CCD Camera |
| Reflection Probe | NA |
| Manual X,Y Stage | Micro Stage type / Stage Size: 400 x 250 mm |
| Auto Focusing Module | Head moves in z direction Ball screw and cross-roller guide DC micro Stepping system 1 limit & 1 home switches Travel range : 25mm Max. velocity : 50mm/s Repeatability : ± 1㎛ |
| Rotating filter wheel | Switching 30 optical filters: 23 band-pass and 2 void filters Used filter range: 420nm ~ 640nm Bandwidth of band pass filter : 10 nm |
| 2D digital B/W CCD | Effective picture elements: 658(H) x 494(V) Picture size : 640X480 pixels Pixel size: 7.4㎛ x 7.4㎛ Frame rate : Up to 60 fps |
| Optical Lens | 5x (spot size 1.48㎛,view of 864X648㎛) for searching object 50x (spot size 0.148㎛,view of 86.4X64.8㎛) |
| Illuminator & Lamp | Tungsten-Halogen stabilized technical lamp Lamp Spec: 12V, 100W. Color temperature: 2,800K Lamp Life time: mean. 1500hr |
| OS | Windows 10 pro |
| Data Acquisition System | Monitor: 24” LCD CPU: Intel-I5 RAM: 8G SSD: 256GB DVDRW |
| Accessory | Power Cable Power Cable Operating manual CD |
