ST 4000-DLX
Leaders of Ideal System
| Item | Specification |
|---|---|
| Measurable Wavelength range | 400 ~ 800nm |
| Detector (Linear Array Type) | 2048 pixels |
| Theoretical resolution | 1nm |
| Measurement spot size | Basic: 40um(M5x Lens), 20um(M10x Lens) Option: 4um(M50x Lens) |
| Measuring Speed | ≤ 2sec/ point (Without Moving) |
| Sample Size | Basic : Under 200 x 200 mm (8” Wafer) Option: Under 300 x 300 mm (12” Wafer) |
| Thickness measurement range | 100 Å ~ 50㎛ (Depending on materials) |
| Multi-layer measurement | Up to 5 layers (Depends on materials) |
| Repeatability (Precision) : 1 sigma | ± 10Å at 5000 Å (SRM certified by KMAC) (Continuously, Measuring the same point 10 times) |
| Item | Specification |
|---|---|
| Measurement and control Unit | System size : 700 (W) X 680(L) X 850(H)mm Weight : about 45 kg |
| Detector | Used wavelength range : 400~800nm Detector: Linear silicon CCD array |
| Reflection Probe | Choose Wavelength : 300~800nm Fiber diameter: 200um |
| Manual X,Y Stage | Roller guide type Stage Size: 200 x 200 mm (8” Wafer) Travel Distance: 200 x 200 mm |
| Manual Focusing Module | Coaxial coarse & fine focusing controls Revolving nosepiece : Triple Aperture and field iris diaphragms Reflection probe head adapter |
| Optical Lens | M5x, M10x |
| Illuminator & Lamp | Tungsten-Halogen stabilized technical lamp Lamp Spec: 12V, 100W. Color temperature: 2,800K Lamp Life time: mean. 1600hr |
| OS | Windows 7 |
| Data Acquisition System | Monitor: 24” LCD CPU: i5↑ RAM: 4G HDD: 1TB DVDRW |
| Spare Part | Tungsten-Halogen stabilized technical lamp Lamp Spec: 12V, 100W. Color temperature: 2,800K Lamp Life time: mean. 1600hr |
| Accessory | Power Cable USB Cable Operating manual CD |
