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  • ST 4000-DLX
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    홈페이지를 방문해주셔서 감사합니다.

    ST 4000-DLX

    Leaders of Ideal System

    • Measurement Function
      Item Specification
      Measurable Wavelength range 400 ~ 800nm
      Detector (Linear Array Type) 2048 pixels
      Theoretical resolution 1nm
      Measurement spot size Basic: 40um(M5x Lens), 20um(M10x Lens)

      Option: 4um(M50x Lens)

      Measuring Speed ≤ 2sec/ point (Without Moving)
      Sample Size Basic : Under 200 x 200 mm (8” Wafer)

      Option: Under 300 x 300 mm (12” Wafer)

      Thickness measurement range 100 Å ~ 50㎛ (Depending on materials)
      Multi-layer measurement Up to 5 layers (Depends on materials)
      Repeatability (Precision) : 1 sigma ± 10Å at 5000 Å (SRM certified by KMAC)

      (Continuously, Measuring the same point 10 times)

      Hard ware Specification
      Item Specification
      Measurement and control Unit System size : 700 (W) X 680(L) X 850(H)mm

      Weight : about 45 kg

      Detector Used wavelength range : 400~800nm

      Detector: Linear silicon CCD array

      Reflection Probe Choose Wavelength : 300~800nm

      Fiber diameter: 200um

      Manual X,Y Stage Roller guide type

      Stage Size: 200 x 200 mm (8” Wafer)

      Travel Distance: 200 x 200 mm

      Manual Focusing Module Coaxial coarse & fine focusing controls

      Revolving nosepiece : Triple

      Aperture and field iris diaphragms Reflection probe head adapter

      Optical Lens M5x, M10x
      Illuminator & Lamp Tungsten-Halogen stabilized technical lamp

      Lamp Spec: 12V, 100W.

      Color temperature: 2,800K

      Lamp Life time: mean. 1600hr

      OS Windows 7
      Data Acquisition System Monitor: 24” LCD

      CPU: i5↑

      RAM: 4G

      HDD: 1TB

      DVDRW

      Spare Part Tungsten-Halogen stabilized technical lamp

      Lamp Spec: 12V, 100W.

      Color temperature: 2,800K

      Lamp Life time: mean. 1600hr

      Accessory Power Cable

      USB Cable

      Operating manual CD