ST 5030-SL
Leaders of Ideal System
| Item | Specification |
|---|---|
| Measurable Wavelength range | 400 ~ 800nm |
| Detector (Linear Array Type) | 2048 pixels |
| Theoretical resolution | 1nm |
| Measurement spot size | Basic: 40um, 20um, 10um Option: 4um(M50x Lens) |
| Measuring Speed | ≤ 3sec/ point (Without Moving) |
| Glass Size | Under 300 x 300 mm (12” Wafer) |
| Thickness measurement range | 100 Å ~ 50㎛ (depending on materials) * Auto 측정 시 100 Å ~ 35㎛ |
| Multi-layer measurement | Up to 3 layers (Depends on materials) |
| Repeatability (Precision) : 1 sigma | ± 3Å at 5000 Å (SRM certified by KMAC) (Continuously, Measuring the same point 10 times) |
| Item | Specification |
|---|---|
| Measurement and control Unit | System size : 500 X 750 X 650mm Weight : about 85 kg |
| Detector | Used wavelength range : 400~800nm Detector: Linear silicon CCD array |
| Reflection Probe | Choose Wavelength : 300~800nm Fiber diameter: 200um |
| Auto X,Y Stage | Motion - Stage moves in X,Y direction Ball screw and cross-roller guide DC servo system 1 limit & 1 home switches (for both of X and Y direction) Measuring travel range: ≤300×300mm Scale resolution : 5㎛ Max. velocity : 50mm/s Repeatability : ± 6㎛ |
| Auto Focus | Head moves in z direction Ball screw and cross-roller guide DC servo system 1 limit & 1 home switches Travel range : 50mm Scale Resolution : 0.4㎛ Max. velocity : 50mm/s Repeatability : ± 4㎛ |
| CCD Camera | - Number of pixels : 490×370 pixels - High performance digital processing(DSP) - Image:1/2” interline transfer CCD - Pixel size: 6.35×7.4㎛ - Picolo capture board |
| Illuminator & Lamp | Tungsten-Halogen stabilized technical lamp Lamp Spec: 12V, 100W. Color temperature: 2,800K Lamp Life time: mean. 1600hr |
| Optical Lens | M5x, M10x |
