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  • ST 5030-SL
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    ST 5030-SL

    Leaders of Ideal System

    • Measurement Function
      Item Specification
      Measurable Wavelength range 400 ~ 800nm
      Detector (Linear Array Type) 2048 pixels
      Theoretical resolution 1nm
      Measurement spot size Basic: 40um, 20um, 10um

      Option: 4um(M50x Lens)

      Measuring Speed ≤ 3sec/ point (Without Moving)
      Glass Size Under 300 x 300 mm (12” Wafer)
      Thickness measurement range 100 Å ~ 50㎛ (depending on materials)

      * Auto 측정 시 100 Å ~ 35㎛

      Multi-layer measurement Up to 3 layers (Depends on materials)
      Repeatability (Precision) : 1 sigma ± 3Å at 5000 Å (SRM certified by KMAC)

      (Continuously, Measuring the same point 10 times)

      Hard ware Specification
      Item Specification
      Measurement and control Unit System size : 500 X 750 X 650mm

      Weight : about 85 kg

      Detector Used wavelength range : 400~800nm

      Detector: Linear silicon CCD array

      Reflection Probe Choose Wavelength : 300~800nm

      Fiber diameter: 200um

      Auto X,Y Stage Motion - Stage moves in X,Y direction

      Ball screw and cross-roller guide

      DC servo system

      1 limit & 1 home switches (for both of X and Y direction)

      Measuring travel range: ≤300×300mm

      Scale resolution : 5㎛

      Max. velocity : 50mm/s

      Repeatability : ± 6㎛

      Auto Focus Head moves in z direction

      Ball screw and cross-roller guide

      DC servo system

      1 limit & 1 home switches

      Travel range : 50mm

      Scale Resolution : 0.4㎛

      Max. velocity : 50mm/s

      Repeatability : ± 4㎛

      CCD Camera - Number of pixels : 490×370 pixels

      - High performance digital processing(DSP)

      - Image:1/2” interline transfer CCD

      - Pixel size: 6.35×7.4㎛

      - Picolo capture board

      Illuminator & Lamp Tungsten-Halogen stabilized technical lamp

      Lamp Spec: 12V, 100W.

      Color temperature: 2,800K

      Lamp Life time: mean. 1600hr

      Optical Lens M5x, M10x